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Growth of Tin Oxide Thin Film by Aluminum and Fluorine Doping Using Spin Coating Sol-Gel Techniques

Autor(s): Susilawati Susilawati, Aris Doyan, Lalu Muliyadi, Syamsul Hakim
DOI: 10.29303/jppipa.v6i1.264


Abstract: The growth of tin oxide thin film by Aluminum doping and Fluorine has been carried out with the sol-gel spin coating technique. The growth aims to determine the quality of the thin layer formed based on variations in doping aluminum and fluorine. The basic ingredients used were SnCl2.2H2O, while the doping materials used were Al (Aluminium) and F (Fluorine) with variations in dopant concentrations (0, 5, 10, 15, 20 and 25)%. The growth of a thin layer using measured glass (10x10x 3) mm as a substrate. The growth of thin films includes substrate preparation, sol-gel making, thin film making, and heating processes. The growth of thin layer was dripped on a glass substrate with sol-gel spin coating technique at 1 M sol concentration and treated with maturation for 24 hours. The next step is making a thin layer using a spin coater at a speed of 2000 rpm for 3 minutes. After that, the substrate is heated in an oven at 100°C for 60 minutes. The results showed that the transparency level of the tin oxide layer increases with increasing amounts of doping Aluminum and fluorine.


Key words: Aluminum, Fluorine, Sol-gel, Spin Coating, Thin Film, Tin Oxide

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Bakr, N.A., Salman, S.A. dan Ali, M.N. (2016). Effect of Fluorine Doping on Structural and Optical Properties of SnO2 Thin Films Prepared by Chemical Spray Pyrolysis Method. Advances in Materials, 5(4): 23-30.

Benyamin, Z.Y., Kelly, P.J., West, G. dan Boardman, J. (2014). Electrical and Optical Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering. Coating, 4: 732-746.

Carvalho, D. H. Q., Schiavona, M. A., Raposoa, M. T., Paivaa, R., Alvesa, J. L. A., Paniagob, dan Roberto, M. (2012). Synthesis and characterization of SnO2 thin films prepared by dip-coating method. Physics Procedia, 28: 22 – 27.

Doyan, A., Susilawati, Ikraman, N., and Taufik, M. (2018). Characterization of SnO2 Film with Al-Zn Doping Using Sol-Gel Dip Coating Techniques. Journal of Physics, 1011: 1-6.

Doyan, A., Susilawati and Imawanti, Y.D. (2017). Synthesis and Characterization of SnO2 thin layer with a doping Aluminum is deposited on Quartz Substrates. American Institute of Physics, 1801: 1-7.

Doyan, A., Susilawati, Imawanti, Y.D. Gunawan, E.R. and Taufik, M. (2017). Characterization Thin Film Nano Particle Of Aluminum Tin Oxide (AlTO) as Touch Screen. Journal of Physics, 1097: 1-9.

Doyan, A., Susilawati, Fitri, S.A. and Ahzan, S. (2017). Cristal Structure and Characterization of Thin Layer Zinc Oxide. Materials Science and Engineering, 196: 1-6.

Doyan, A., Humaini. (2017). Optical Properties of ZnO Thin Film. Jurnal Pendidikan Fisika dan Teknologi, 3(1): 34-39.

Gahtar A., A. Rahal, B. Benhaoua, S. Benramache. (2014). A Comparative Study on Structural and Optical Properties of ZnO and Al-doped ZnO Thin Films Obtained by Ultrasonic Spray Method Using Different Solvents. Elsevier.Optik, 125, 3674–3678.

Ikraman‚ N., Doyan, A. dan Susilawati. (2017). Growth of SnO2 Films with Doping Al-Zn Using the Solgel Dip Coating Technique. Jurnal Pendidikan Fisika dan Teknologi, 3(2): 228-231.

Imawanti, Y.D., Doyan, A. dan Gunawan, E.R. (2017). Thin Film Synthesis of SnO2 and SnO2: Al Using Sol-Gel Spin Coating Technique on Glass Substrates and Quartz. Jurnal Penelitian Pendidikan IPA, 3(1): 1-9.

Lin O.S., Thu, Z., Zaw O. dan Kaung, P. (2017). Optical and Electrical Properties of Antimony and Fluorine Doped Tin Oxide Thin Films. Universal Journal of Physics and Application, 11(3): 91-96.

Ma, Qian. Zheng, He-Mei. Shao, Yan. Zhu, Bao. Liu, Wen-Jun. Ding, Shi-Jin. Zhang, David Wei. (2018). Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors. Journal Nanoscale Research Letters, 13:4.

Maddu, A., Hasiholan, R. T., Kurniati, M., 2009. Growth of Nanocrystalline SnO2 Films with Chemical Bath Deposition (CBD) Method, J. Nano sains dan Teknologi. Special edition, 96-99.

Mawarani, L. J. (2006). Characterization of SnO2 DC Sputtering Thin Layer as CO Gas Sensor Elements, J. Sains Materi Indonesia. 8, 35-39

Onkundi, P. N., Munji, K. M., Bem, D. B., and Muthoka, B. (2018). Effect of Deposition Parameters on Optical and Electrical Properties of SnO2: Al Thin Films Prepared by Spray Pyrolysis Technique for Optoelectronic Devices. International Journal of Thin Films Science and Technology, 1: 25-33.

Rebholz, J., Dee, C., Weimar, U., Barsan, N. (2015). A self-doping surface effect and its influence on the sensor performance of undoped SnO2 based gas sensors. Procedia Engineering 120: 83 – 87.

Schell, J., Lupascu, D.C., Carbonari, A.W., Mansano, R.D., Dang, T.T. dan Vianden, R. (2017). Implantation of cobalt in SnO2 thin films studied by TDPAC. American Institute of Physics Advances, 7: 1-7.

Xu, B. Ren, X. G. Gu, G. R. Lan, L. L. Wu, B.J. (2016). Structural and Optical Properties of Zn-doped SnO2 Films Prepared by DC and RF-Magnetron Co-Sputtering. Superlattices and Microstructures.


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