Synthesis Thin Films SnO2 with Doping Indium by Sol-gel Spin coating

Autor(s): Syamsul Hakim, Aris Doyan, Susilawati Susilawati, Lalu Muliyadi
DOI: 10.29303/jppipa.v5i2.254


Abstract:This research is an experimental study that aims to support the temperature and variation of doping in making thin films. The temperature variations at room temperature annealing, 50, 100, 150, and 200oC, and doping variations of 0, 5, 10, 15, 20, and 25%. The method used in this study is sol-gel spin coating. The results showed that thin films at low temperatures were more transparent than higher temperatures and the increase percentage doping causing thin films to be more transparent.


Keywords:Thin Films; SnO2; Indium, Sol-gel, Spin Coating.


Thin Films; SnO2; Indium, Sol-gel, Spin Coating.

Full Text:



Angarita, G. Palacio, C. Trujillo, M. Arroyave, M. 2017. Synthesis of Alumina Thin Films Using Reactive Magnetron Sputtering Method. IOP Conf. Series: Journal of Physics: Conf. Series 850 (2017) 012022.

Doyan, A., Susilawati, Fitri, S. A., Ahzan, A., 2016. Crystal Structure Characterization of Thin Layer Zinc Oxide. IOP Conf. Series: Materials Science and Enginering 196 (2017) 012004. DOI. 10.1088/1757-899X/196/1/012004.

Doyan, A., Susilawati, Ikraman, N., Taufik, M., 2018. Characterization of SnO2 Film with Al-Zn Doping Using Sol-gel Dip Coating Tecniques. IOP Conf. Journal of Physics: Conf. Series 1011 (2018) 012015. DOI. 10.1088/1742-6596/1011/1/012015.

Doyan, A., Susilawati, Imawanti, Y. D. 2017. Synthesis and Characterization of SnO2 Thin Layer with a Doping Aluminium is Deposited on Quartz Substrates. AIP Conference Proceedings 1801, 020005.

Doyan, A., Susilawati, Imawanti, Y. D., Gunawan, E. R., Taufik, M., 2018. Characterization Thin Films Nano Particle of Aluminum Tin Oxide (AITO) as Touch Screen. IOP Conf. Series: Journal of Physics: Conf. Series 1097 (2018) 012009. DOI. 10.1088/1742-6596/1097/1/012009.

Hammad, Talaat M. dan Naser K. Hejazy. 2011.Structural, Electrical and Optical Properties of ATO Thin filmss Fabricated by Dip Coating Method. Int. Nano Lett. 1(2) 123-128.

Ma, Qian. Zheng, He-Mei. Shao, Yan. Zhu, Bao. Liu, Wen-Jun. Ding, Shi-Jin. Zhang, David Wei. 2018. Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors. Journal Nanoscale Research Letters. Letters 13:4.

Muthuraja, S. Balakrishnan, L. Govardhan. Roopan, S. M. Kumaran, S. M. 2015. Structural, optical, morphological and organic vapours sensing properties of SnO2 nanostructures. J. Indian Chems. Soc., Vol. 92. 2015, pp. 755-759.

Ng, Zi-Neng. Chan, Kah-Yoong. Kamaruddin, S. A. Sahdan, M. Z. 2014. Influence of Spinning Speed on the Properties of Sol-Gel Spin Coated ZnO Films. JournalAdvanced Materials Research, Vol. 970 (2014) pp 115-119.

Patel, P. Karmakar, A. Jariwala, C. Ruparelia, J. P. 2013. Preparation and Characterization of SnO2 Thin films Coating using rf-Plasma Enhaced Reactive Thermal Evavoration. Journal. Procedia Enginering 51 (2013) 473-479.

Pertiwi, P. K. Huda, I. Maulana A. Prajitno, G. 2015. Pembentukan Lapisan Tipis Menggunakan Metode Spin Coating dan Larutan MMA. Jurnal. Fisika Laboratorium-Lab Optoelektronika.

Rebholz, J., Dee, C., Weimar, U., Barsan, N. 2015. A self-doping surface effect and its influence on the sensor performance of undoped SnO2 based gas sensors. Procedia Engineering 120 (2015 ) 83 – 87.

Selvi, T., Sundar, S. M., Selvakumar, P., Ponnusamy, P. M. 2017. Structural, optical and magnetic properties of SnO2 quantum dot. Journal. Mater sci: Mater Electron. Springer.

Velumani, M. Meher, S. R.. Alex, Z. C. 2017. Impedometric humidity sensing characteristics of SnO2 thin films and SnO2-ZnO composite thin films grown by magnetron sputtering. Journal of Material Science: Material in Electronics.

Xu, B. Ren, X. G. Gu, G. R. Lan, L. L. Wu, B.J. 2016. Structural and Optical Properties of Zn-doped SnO2 Films Prepared by DC and RF Magnetron Co-Sputtering. Superlattices and Microstructures.

Yongvanich, N. Thongkaew, K. Yuanlae N. Sae-ung, S.. Suwanchawalit C.. 2018. Influence of Copper Doping in Nanostructured ZnO Thin Films by Spin Coating. IEEE Transactions on Nanotechnology, Vol. 17. (6).

Zhao, Q., Ju, D., Deng, X., Xu, X. J. 2015. Morphology-modulation of SnO2 Hierarchical Architectures by Zn Doping for Glycol Gas Sensing and Photocatalytic Applications. Scientific Reports published 19 January 2015.

Zoubir, H. Ouerdane, A. Bouslama, M. Benamara, A. A. 2016. Investigation of The Properties of Sb doping on tin oxide SnO2 Materials for Technological Applications.3rd International Conference on Competitive Materials and Technology Processes.


  • There are currently no refbacks.